在高精密涂布和更广泛领域成为世界级头部企业。
| Project | Specification | ||
| Frame material | stainless steel | ||
| steelPumping speed | atmospheric pressure up to 20 Pa, customized timesetting according to customer requirements | ||
| Pump | domestic or imported (according to customer's requirements) | ||
| Vent | Use N2 or CDA | ||
| Glass conveyor | Manual or automatic | ||
| Observation windowt | Configuration | ||
| Precision control mode |
Automatic butterfly valve 3-step opening control + customization Stop when reach the vacuum level or setting time; Pressure and time curves recordable |
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| Project | Specification | ||
| Vacuum pumping rate | customized according to customer requirements | ||
| Temperature range | Max.120℃ | ||
| Temperature uniformity | ±3℃ | ||
| Heater arrangement | outside the chamber | ||
| Number of chamber | single or double | ||
| chambers PCB Support Pin | Removable (Magnetically Fixed) | ||
| Vacuum process control | ≥5-Step vacuuming +Main vacuuming Process + customization | ||
| Vacuum break | N2 Purge (MFC)+ Break Filter | ||
| Vacuum pump | Kashiyama or equivalent | ||
| Trap tank | Trap method with cold water condensation and automatic draining | ||
| Inner cavity cleanliness | better than class 100 | ||
