在高精密涂布和更广泛领域成为世界级头部企业。
| ltem | Specification | ||
| HP temperature | The heater sets the temperature:Max.250°C Hot air setting temperature:Max.250°C |
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| Substrate surface temperature uniformity | ±3℃ (Measured at 200C) | ||
| Temperature measurement method | 9 point, 10mm from the edge of the glass | ||
| Proximity Pin height | 0.3mm | ||
| Hot plate size | G2.5~G10 | ||
| Hot air | Hot air infusion | ||
| Lift-pin Lifting | Servo motor control | ||
| Lift-pin Material |
Body: stainless steel; top:Polyamide-imide |
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| Chamber Material | Stainless steel | ||
| Chamber Lifting | Cylindar | ||
| HP Chamber maintenance | Flip-up lid with pull-out structure drawer | ||

| Item | Specification | ||
| CP temperature | 23±2℃ | ||
| Temperature measuring method | 9 points, distance to edge 10mm | ||
| Cold plate size | G2.5~G10 | ||
| Cooling method | Adsorption cooling (cooling water provided by customers) | ||
| Lift-pin lifting | Servo motor control | ||
| Lift-pin material |
Main body:stainless steel; Polyamide-imide |
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| lonizer | optional | ||
| Chamber material | Stainless steel | ||
| Chamber lifting | Cylindar | ||
| CP chamber maintenance | Pull-out construction, drawer | ||